Silicon Wet Bulk Micromachining for MEMS

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Silicon Wet Bulk Micromachining for MEMS
Prem Pal, Kazuo Sato
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Last edited by MARC Bot
December 15, 2022 | History

Silicon Wet Bulk Micromachining for MEMS

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Publish Date
Language
English

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Edition Availability
Cover of: Silicon Wet Bulk Micromachining for MEMS
Silicon Wet Bulk Micromachining for MEMS
2017, Taylor & Francis Group
in English
Cover of: Silicon Wet Bulk Micromachining for MEMS
Silicon Wet Bulk Micromachining for MEMS
2017, Jenny Stanford Publishing
in English
Cover of: Silicon Wet Bulk Micromachining for MEMS
Silicon Wet Bulk Micromachining for MEMS
2017, Jenny Stanford Publishing
in English

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Book Details


Classifications

Library of Congress
TK7875

The Physical Object

Pagination
424
Weight
0.953

ID Numbers

Open Library
OL34631217M
ISBN 13
9789814613729
OCLC/WorldCat
982121322

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History

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December 15, 2022 Edited by MARC Bot import existing book
October 6, 2021 Created by ImportBot import new book